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Home › Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system

Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system

US Patent 8384879 · Granted Feb 26, 2013

Estimated economic value: $6,348,000 ⓘ

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