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Home › Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion

Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion

US Patent 7321416 · Granted Jan 22, 2008

Estimated economic value: $6,022,000 ⓘ

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