Measurement substrate and a measurement method

Assignee

• Asml Netherlands B.V.

Inventors

• Stoyan Nihtianov (20 patents)
• Ruud Hendrikus Martinus Johannes Bloks (28 patents)
• Johannes Paul Marie De La Rosette (3 patents)
• Thibault Simon Mathieu Laurent (43 patents)
• Kofi Afolabi Anthony Makinwa (28 patents)
• Patricius Jacobus Neefs (5 patents)
• Johannes Petrus Martinus Bernardus Vermeulen (69 patents)

View full patent text on Google Patents →