Method for forming transparent conductive oxide

Assignee

• Applied Materials

Inventors

• Valery V. Komin (2 patents)
• Hien Minh Le (58 patents)
• David Tanner (33 patents)
• James S. Papanu (64 patents)
• Philip A. Greene (4 patents)
• Suresh Shrauti (3 patents)
• Roman Gouk (49 patents)
• Steven Verhaverbeke (136 patents)

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