Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology

System method and apparatus for dry-in, dry-out, low defect laser dicing using proximity technology

US Patent 8330072 · Granted Dec 11, 2012

Estimated economic value: $5,034,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Roller for location-specific wafer polishing2025
Polishing articles and integrated system and methods for manufacturing chemical 2024
Integrated abrasive polishing pads and manufacturing methods2024
CMP pad construction with composite material properties using additive manufactu2024
Polishing system with annular platen or polishing pad2023
Polishing system with support post and annular platen or polishing pad2022
Integrated abrasive polishing pads and manufacturing methods2022
Precursor formulations for polishing pads produced by an additive manufacturing 2022
Polishing pads produced by an additive manufacturing process2020
Polishing pads produced by an additive manufacturing process2020
Multi-layered nano-fibrous CMP pads2020
Thin plastic polishing article for CMP applications2020