Directional gas injection for an ion source cathode assembly

Assignee

• Varian Semiconductor Equipment Associates

Inventors

• Unknown
• David J. Twiss (1 patents)
• Chris Campbell (24 patents)
• Frank Sinclair (139 patents)
• Alexander S. Perel (35 patents)
• Craig R. Chaney (45 patents)
• Wilhelm P. Platow (17 patents)
• Eric R. Cobb (13 patents)

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