Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method

Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method

US Patent 8237912 · Granted Aug 7, 2012

Estimated economic value: $8,994,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for inspection2025
Lithographic apparatus, device manufacturing method, and method of correcting a 2025
Interferometric gas sensor2025
Calibration system for an extreme ultraviolet light source2024
Computational wafer inspection2024
Vessel for a radiation source2024
Method and apparatus for inspection2024
Method for characterizing a manufacturing process of semiconductor devices2024
Prolonging optical element lifetime in an EUV lithography system2023
Lithographic apparatus and device manufacturing method2023
Focal in-field pointing telescope system2023
Lithographic apparatus and device manufacturing method2023