Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Clamped showerhead electrode assembly

Clamped showerhead electrode assembly

US Patent 8161906 · Granted Apr 24, 2012

Estimated economic value: $7,669,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tunability of edge plasma density for tilt control2025
Plasma processing chambers configured for tunable substrate and edge sheath cont2025
Systems and methods for controlling a voltage waveform at a substrate during pla2025
Apparatus and method for controlling edge ring variation2025
Condition selectable backside gas2025
Magnetic field control system2025
Methods and apparatus for conductance liners in semiconductor process chambers2025
Multi-shape voltage pulse trains for uniformity and etch profile tuning2025
Integrated cleaning process for substrate etching2025
Plasma processing assembly using pulsed-voltage and radio-frequency power2025
Lift pin mechanism2025
Showerhead faceplates with angled gas distribution passages for semiconductor pr2024