Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Capacitively coupled plasma reactor with magnetic plasma control

Capacitively coupled plasma reactor with magnetic plasma control

US Patent 7955986 · Granted Jun 7, 2011

Estimated economic value: $12,413,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus to produce a waveform2025
Masking member, and method for coating hollow member2025
System, method, and apparatus for controlling ion energy distribution in plasma 2025
Cutting tool for band clamp2025
Semiconductor substrate support power transmission components2025
Hybrid dynamic vision sensor and CMOS device for motion compensation2025
System and method to support in-order message processing with reactive microserv2025
Batch curing chamber with gas distribution and individual pumping2025
Apparatus to control a waveform2024
Flow control features of CVD chambers2024
Flow control features of CVD chambers2024
Systems and methods for monitoring faults, anomalies, and other characteristics 2024