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Home › Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device

Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device

US Patent 7933000 · Granted Apr 26, 2011

Estimated economic value: $12,938,000 ⓘ

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