Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for an in-situ ultraviolet cleaning tool

Method and apparatus for an in-situ ultraviolet cleaning tool

US Patent 7921859 · Granted Apr 12, 2011

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ta—Cu alloy material for extreme ultraviolet mask absorber2021
Cleaning solution mixing system with ultra-dilute cleaning solution and method o2021
Reflective mask blank for EUV lithography2021
Reflective mask blank for EUV lithography, and process for its inspection and pr2017
Reflective mask blank for EUV lithography, method of manufacturing thereof, refl2016
SPARC-derived tumor rejection antigenic peptides and medicaments comprising the 2015
Reflective layer-equipped substrate for EUV lithography, reflective mask blank f2015
Multilayer substrate, manufacturing method for multilayer substrate, and quality2014
Reflecting mask blank, method for manufacturing reflective mask blank and method2014
Apparatus with surface protector to inhibit contamination2014
Multilayer mirror for EUV lithography and process for its production2013
Gigasonic brush for cleaning surfaces2013