Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Heat-treating apparatus and method of producing substrates

Heat-treating apparatus and method of producing substrates

US Patent 7901206 · Granted Mar 8, 2011

Estimated economic value: $86,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing apparatus, substrate holding apparatus, and method of manuf2025
Substrate processing apparatus and furnace opening cover2022
Substrate treatment apparatus including reaction tube with opened lower end, fur2019
Method of manufacturing semiconductor device, substrate processing apparatus, an2019
Gas supply nozzle, substrate processing apparatus, and non-transitory computer-r2018
Method of manufacturing semiconductor device, substrate processing apparatus, an2018
Method of manufacturing semiconductor device, substrate processing apparatus, an2018
Method of manufacturing semiconductor device and substrate processing apparatus2018
Method of manufacturing semiconductor device and substrate processing apparatus2018
Method of manufacturing semiconductor device, substrate processing apparatus, an2018
Method of manufacturing a SiOCN film, substrate processing apparatus and recordi2017
Substrate processing apparatus, method for manufacturing semiconductor device, a2017