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Home › Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

US Patent 7862857 · Granted Jan 4, 2011

Estimated economic value: $1,126,000 ⓘ

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