Substrate support and lithographic process

Assignee

• Asml Netherlands B.V.

Inventors

• Pieter Renaat Maria Hennus (11 patents)
• Frits Van Der Meulen (46 patents)
• Joost Jeroen Ottens (124 patents)
• Peter Paul Steijaert (12 patents)
• Hubert Matthieu Richard Steijns (3 patents)
• Peter Smits (14 patents)

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