Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 11669021 · Granted Jun 6, 2023

Estimated economic value: $66,472,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic apparatus and method2025
System and method for scanning a sample using multi-beam inspection apparatus2024
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus and device manufacturing method2023
Lithographic apparatus and method2023
Lithographic apparatus and device manufacturing method2022
System and method for scanning a sample using multi-beam inspection apparatus2022
Metrology method, patterning device, apparatus and computer program2022
Lithographic apparatus and device manufacturing method involving a heater2022
Lithographic apparatus and method2022
Lithographic apparatus and device manufacturing method2022
Lithographic apparatus and device manufacturing method2022