Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

US Patent 11275316 · Granted Mar 15, 2022

Estimated economic value: $189,712,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic apparatus and method2025
System and method for scanning a sample using multi-beam inspection apparatus2024
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus and device manufacturing method2023
Lithographic apparatus and device manufacturing method2023
Lithographic apparatus and device manufacturing method2023
Lithographic apparatus and method2023
Lithographic apparatus and device manufacturing method2022
System and method for scanning a sample using multi-beam inspection apparatus2022
Metrology method, patterning device, apparatus and computer program2022
Lithographic apparatus and device manufacturing method involving a heater2022
Lithographic apparatus and method2022