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Home › In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques

US Patent 7781733 · Granted Aug 24, 2010

Estimated economic value: $3,306,000 ⓘ

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