Method for supporting a glass substrate to improve uniform deposition thickness

Assignee

• Applied Materials

Inventors

• Soo Young Choi (176 patents)
• Beom Soo Park (68 patents)
• Quanyuan Shang (57 patents)
• Robert I. Greene (8 patents)
• John M. White (252 patents)
• Dong-Kil Yim (43 patents)
• Chung-Hee Park (5 patents)
• Kam S. Law (71 patents)

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