Transistor devices with multi-layer interlayer dielectric structures

Assignee

• Applied Materials

Inventors

• Yun-Chu Tsai (4 patents)
• Dejiu Fan (7 patents)
• Jung Bae Kim (89 patents)
• Yang-Ho Bae (33 patents)
• Rodney Shunleong Lim (6 patents)
• Dong-Kil Yim (43 patents)

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