{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Substrate support having brazed plates and resistance heater", "item": "https://www.patentleaderboard.com/patent/7705275"}]}
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Home › Substrate support having brazed plates and resistance heater

Substrate support having brazed plates and resistance heater

US Patent 7705275 · Granted Apr 27, 2010

Estimated economic value: $16,065,000 ⓘ

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