Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication

Methods and systems to mitigate etch stop clipping for shallow trench isolation fabrication

US Patent 7625807 · Granted Dec 1, 2009

Estimated economic value: $21,874,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for the integration of monolithic thin film radiation detector systems2022
Methods to enhance effective work function of mid-gap metal by incorporating oxy2019
High-K metal gate2018
Methods to enhance effective work function of mid-gap metal by incorporating oxy2017
High-K metal gate2016
Structure and method for metal gate stack oxygen concentration control using an 2016
Methods to enhance effective work function of mid-gap metal by incorporating oxy2015
Semiconductor device and method for low resistive thin film resistor interconnec2015
Structure and method for metal gate stack oxygen concentration control using an 2015
Semiconductor device and method for low resistive thin film resistor interconnec2014
Method of substantially reducing the formation of SiGe abnormal growths on polyc2014
Formation of metal gate electrode using rare earth alloy incorporated into mid g2014