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Home › Apparatus for accurate and efficient quality and reliability evaluation of micro electromechanical systems

Apparatus for accurate and efficient quality and reliability evaluation of micro electromechanical systems

US Patent 7602265 · Granted Oct 13, 2009

Estimated economic value: $16,422,000 ⓘ

Assignee

IBM

Inventors

Hariklia Deligianni (171 patents)
Robert D. Edwards (11 patents)
Thomas J. Fleischman (33 patents)
Robert A. Groves (60 patents)
Charles J. Montrose (13 patents)
Richard P. Volant (99 patents)
Ping-Chuan Wang (205 patents)

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