Crack trapping and arrest in thin film structures

Assignee

• IBM

Inventors

• Thomas M. Shaw (88 patents)
• Michael Lane (38 patents)
• Xio Hu Liu (2 patents)
• Griselda Bonilla (95 patents)
• James P. Doyle (42 patents)
• Howard S. Landis (50 patents)
• Eric G. Liniger (31 patents)

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