Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device manufacturing method, device manufactured thereby and a mask for use in the method

Device manufacturing method, device manufactured thereby and a mask for use in the method

US Patent 7492443 · Granted Feb 17, 2009

Estimated economic value: $2,485,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vibration isolator for supporting a payload2025
Lithographic system provided with a deflection apparatus for changing a trajecto2025
Calibration system for an extreme ultraviolet light source2024
Lithographic apparatus and electrostatic clamp designs2024
Lithographic apparatus2024
Vessel for a radiation source2024
Prolonging optical element lifetime in an EUV lithography system2023
Prolonging optical element lifetime in an EUV lithography system2023
Lithographic apparatus and device manufacturing method2023
Lithographic apparatus and device manufacturing method involving a heater2022
Prolonging optical element lifetime in an EUV lithography system2022
Prolonging optical element lifetime in an EUV lithography system2022