Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Technique for improving performance and extending lifetime of indirectly heated cathode ion source

Technique for improving performance and extending lifetime of indirectly heated cathode ion source

US Patent 7491947 · Granted Feb 17, 2009

Estimated economic value: $16,233,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lattice based voltage standoff2025
Helical voltage standoff2025
Temperature control for insertable target holder for solid dopant materials2025
Molten liquid transport for tunable vaporization in ion sources2024
System and method for introducing aluminum to an ion source2024
Temperature control for insertable target holder for solid dopant materials2023
High output ion source, ion implanter, and method of operation2022
Thermally isolated repeller and electrodes2022
Temperature control for insertable target holder for solid dopant materials2021
Ion source thermal gas bushing2021
Thermally isolated repeller and electrodes2020
Embedded features for interlocks using additive manufacturing2020