Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus and process for sensing fluoro species in semiconductor processing systems

Apparatus and process for sensing fluoro species in semiconductor processing systems

US Patent 7475588 · Granted Jan 13, 2009

Estimated economic value: $9,458,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of preparing iodosilanes and compositions therefrom2025
Group VI metal deposition process2025
Group VI metal deposition process2025
Methods for depositing a tungsten or molybdenum layer in the presence of a reduc2025
Process for preparing organotin compounds2025
Localized high-salt-concentration electrolytes containing longer-sidechain glyme2025
Silicon precursor compounds and method for forming silicon-containing films2025
Group VI precursor compounds2025
Methods for depositing tungsten or molybdenum films2025
Methods for depositing tungsten or molybdenum films2025
Haloalkynyl dicobalt hexacarbonyl precursors for chemical vapor deposition of co2025
Vapor deposition precursor compounds and process of use2025