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Home › Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

US Patent 7344589 · Granted Mar 18, 2008

Estimated economic value: $5,664,000 ⓘ

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