Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Dry etchback of interconnect contacts

Dry etchback of interconnect contacts

US Patent 7323410 · Granted Jan 29, 2008

Estimated economic value: $11,919,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Local interconnects having different material compositions2025
Layered bottom electrode dielectric for embedded MRAM2025
Recessed local interconnect semiconductor memory device2025
FinFET devices2025
Modified top electrode contact for MRAM embedding in advanced logic nodes2025
Structure and method to improve FAV RIE process margin and electromigration2024
Dielectric fill for tight pitch MRAM pillar array2024
High-density memory devices using oxide gap fill2024
Optimizating semiconductor binning by feed-forward process adjustment2024
Selective recessing to form a fully aligned via2023
Pillar-based memory hardmask smoothing and stress reduction2023
Structure and method to improve FAV RIE process margin and Electromigration2023