Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing

Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing

US Patent 7307689 · Granted Dec 11, 2007

Estimated economic value: $2,134,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Particle beam inspection apparatus2025
Fluid transfer system in a charged particle system2025
Droplet generator nozzle2024
Fluid transfer system in a charged particle system2024
Particle beam inspection apparatus2024
Coil assembly for magnetic actuator, magnetic actuator and manufacturing method2023
Particle beam inspection apparatus2022
Positioning device, stiffness reduction device and electron beam apparatus2021
Actuator, positioning device, lithographic apparatus, and method for manufacturi2019
Actuation mechanism, optical apparatus and lithography apparatus2018
Actuation mechanism, optical apparatus, lithography apparatus and method of manu2017
Actuation mechanism, optical apparatus, lithography apparatus and method of manu2017