Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Actuation mechanism, optical apparatus and lithography apparatus

Actuation mechanism, optical apparatus and lithography apparatus

US Patent 9927711 · Granted Mar 27, 2018

Estimated economic value: $7,635,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wavelength selection module, illumination system and metrology system2025
Metrology apparatus2024
Systems and methods of cooling objective lens of a charged-particle beam system2023
Substrate positioning device and electron beam inspection tool2023
Metrology apparatus2023
E-beam apparatus2022
Metrology apparatus2022
Positioning device, stiffness reduction device and electron beam apparatus2021
Lithographic apparatus and device manufacturing method2021
Metrology apparatus2021
E-beam apparatus2020
Inspection apparatus having non-linear optics2020