Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Sensor with at least one micromechanical structure, and method for producing it

Sensor with at least one micromechanical structure, and method for producing it

US Patent 7273764 · Granted Sep 25, 2007

Estimated economic value: $6,226,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for producing a bonding pad for a micromechanical sensor element2025
Method for producing a plurality of sensor devices, and sensor device2025
Device for detecting sound in the surroundings of an automobile2024
Micromechanical component for a capacitive pressure sensor device2024
Micromechanical component for a capacitive pressure sensor device2024
MEMS capacitive sensor including improved contact separation2024
Micromechanical component and method for manufacturing a micromechanical compone2024
Micromechanical sensor device having an ASIC chip integrated into a capping unit2024
Method for sealing entries in a MEMS element2023
Method for producing a micromechanical device having inclined optical windows, a2023
Production method for a micromechanical device having inclined optical windows, 2022
MEMS optical switch with stop control2022