Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Replacement apparatus for an optical element

Replacement apparatus for an optical element

US Patent 7265917 · Granted Sep 4, 2007

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for maintaining a projection exposure apparatus, service module and arran2025
Damping arrangement for vibration damping of an element in an optical system2025
Supporting an optical element2022
Projection exposure apparatus for semiconductor lithography2022
Optical assembly having a thermally conductive component2021
Method and device for the correction of imaging defects2021
Optical imaging arrangement with actively adjustable metrology support units2021
Imaging optical system for microlithography2020
Method and device for the correction of imaging defects2020
Projection exposure apparatus, and method for reducing deformations, resulting f2020
Optical assembly having a thermally conductive component2019
Optical imaging arrangement with a piezoelectric device2019