Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optical assembly having a thermally conductive component

Optical assembly having a thermally conductive component

US Patent 10509336 · Granted Dec 17, 2019

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Production method and measurement method2025
Method for treating a reflective optical element for the EUV wavelength range, m2022
Optical assembly having a thermally conductive component2021
Optical assembly having a thermally conductive component2021
Optical assembly having a thermally conductive component2021
Optical assembly having a thermally conductive component2021
Method for repairing reflective optical elements for EUV lithography2021
Method and device for the correction of imaging defects2021
Reflective optical element for EUV lithography2020
Method and device for the correction of imaging defects2020
Microlithographic projection exposure apparatus and measuring device for a proje2019
Microlithography projection objective2019