Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus, device manufacturing method and device manufactured thereby

Lithographic apparatus, device manufacturing method and device manufactured thereby

US Patent 7095479 · Granted Aug 22, 2006

Estimated economic value: $4,669,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Lithographic system provided with a deflection apparatus for changing a trajecto2025
Substrate support, lithographic apparatus, method for manipulating charge distri2025
Calibration system for an extreme ultraviolet light source2024
Lithographic apparatus and electrostatic clamp designs2024
Lithographic apparatus2024
Vessel for a radiation source2024
Prolonging optical element lifetime in an EUV lithography system2023
Prolonging optical element lifetime in an EUV lithography system2023
Lithographic apparatus and device manufacturing method2023
Prolonging optical element lifetime in an EUV lithography system2022
Prolonging optical element lifetime in an EUV lithography system2022
Lithographic apparatus and device manufacturing method2022