Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Barrier for interconnect and method

Barrier for interconnect and method

US Patent 6992389 · Granted Jan 31, 2006

Estimated economic value: $6,009,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Actuator apparatus with light actuated position sensor and secure position verif2025
Self aligned pattern formation post spacer etchback in tight pitch configuration2024
Actuator apparatus with light actuated position sensor and secure position verif2024
Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tun2024
Method for removing hard masks2023
Wet etching composition and method2023
Silicon nitride etching composition and method2023
Self aligned pattern formation post spacer etchback in tight pitch configuration2023
Compositions and methods for selectively etching silicon nitride films2022
Method and composition for etching molybdenum2022
Wet etching composition and method2022
Ruthenium etching composition and method2022