Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for edge polishing uniformity control

Apparatus for edge polishing uniformity control

US Patent 6991512 · Granted Jan 31, 2006

Estimated economic value: $25,756,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Autoclean for load locks in substrate processing systems2024
Halogen removal module and associated systems and methods2021
Symmetric RF return path liner2018
Systems and methods for quantifying particle performance in a substrate processi2016
Plasma confinement ring assembly for plasma processing chambers2015
Method of making a gas distribution member for a plasma processing chamber2014
Edge ring assembly for plasma etching chambers2014
High lifetime consumable silicon nitride-silicon dioxide plasma processing compo2014
Single nanoparticle tracking spectroscopic microscope2011
System and method for in situ characterization and maintenance of polishing pad 2006
Assembly and method for generating a hydrodynamic air bearing2006
Air platen for leading edge and trailing edge control2006