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Home › Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

Scalable lead zirconium titanate (PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

US Patent 6984417 · Granted Jan 10, 2006

Estimated economic value: $16,577,000 ⓘ

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