Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Collection of secondary electrons through the objective lens of a scanning electron microscope

Collection of secondary electrons through the objective lens of a scanning electron microscope

US Patent 6946654 · Granted Sep 20, 2005

Estimated economic value: $5,171,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Scanning electron microscope2021
Scanning electron microscope2020
Wide-gamut-color image formation and projection2020
Sample stage2020
Imprint lithography2017
Corrector for the correction of chromatic aberrations in a particle-optical appa2014
Inspection method and apparatus, lithographic apparatus, lithographic processing2014
Imprint lithography2014
Test specimen for testing through-thickness properties2014
Method of determining overlay error and a device manufacturing method2013
Microcalorimetry for X-ray spectroscopy2013
In-chamber electron detector2012