Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Selective etching of low-k dielectrics

Selective etching of low-k dielectrics

US Patent 6897154 · Granted May 24, 2005

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Hybrid dynamic vision sensor and CMOS device for motion compensation2025
Optical module and projection apparatus2022
HDMI apparatus using optical communication2022
HDMI apparatus using optical communication2021
Thin film semiconductor material produced through reactive sputtering of zinc ta2020
Charging-discharging module of energy storage unit and charging-discharging meth2020
Method of IGZO and ZnO TFT fabrication with PECVD SiO2 passivation2018
Methods and apparatuses for delaminating process pieces2017
Method of IGZO and ZNO TFT fabrication with PECVD SiO2 passivation2017
Thin film semiconductors made through low temperature process2016
Buffer layers for metal oxide semiconductors for TFT2016
Thin film metal oxynitride semiconductors2015