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Home › Optical systems for measuring form and geometric dimensions of precision engineered parts

Optical systems for measuring form and geometric dimensions of precision engineered parts

US Patent 6822745 · Granted Nov 23, 2004

Estimated economic value: $1,232,000 ⓘ

Assignee

Zygo

Inventors

Peter De Groot (126 patents)
Xavier Colonna De Lega (39 patents)
David Grigg (19 patents)
James F. Biegen (9 patents)

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