Assignee
- Asahi Glass Co.
- Anelva
- Ulvac
- Kanto Denka Kogyo Co.
- Sanyo Electric Co.
- Sony
- Daikin Industries
- Tokyo Electron Limited
- Nec Electronics
- Hitachi Kokusai Electric
- Sumitomo Electric Industries
- Renesas Technology
Inventors
- Akira Sekiya (20 patents)
- Yuki Mitsui (7 patents)
- Ginjiro Tomizawa (10 patents)
- Katsuya Fukae (5 patents)
- Yutaka Ohira (23 patents)
- Taisuke Yonemura (6 patents)