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Home › Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation

Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation

US Patent 6759321 · Granted Jul 6, 2004

Estimated economic value: $6,814,000 ⓘ

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