Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition

Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition

US Patent 6747729 · Granted Jun 8, 2004

Estimated economic value: $16,167,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Interferometric stage positioning apparatus2022
Method of monitoring and device manufacturing method2020
Encoder, position measurement system and lithographic apparatus involving an enc2020
Method and apparatus for processing a substrate in a lithographic apparatus2020
Method of calibrating a lithographic apparatus, device manufacturing method and 2015
Measuring method, measuring apparatus, lithographic apparatus and device manufac2013
Lithographic apparatus and device manufacturing method2013
Population of background suppression lists from limited data in agent detection 2011
Lithographic apparatus temperature compensation2011
Position measurement system and lithographic apparatus2009
Lithographic apparatus and interferometer system2009
Agent detection in the presence of background clutter2009