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Home › Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivatives and positive resist materials containing the same

Tertiary butyl 4,4-bis(4′-hydroxyphenyl) pentanoate derivatives and positive resist materials containing the same

US Patent 6667415 · Granted Dec 23, 2003

Estimated economic value: $4,565,000 ⓘ

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