Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Gas discharge laser long life electrodes

Gas discharge laser long life electrodes

US Patent 6466602 · Granted Oct 15, 2002

Estimated economic value: $5,382,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Guiding device and associated system2025
Laser system for source material conditioning in an EUV light source2025
Oxygen-loss resistant top coating for optical elements2025
System for monitoring a plasma2024
Laser system for target metrology and alteration in an EUV light source2024
Prolonging optical element lifetime in an EUV lithography system2023
Guiding device and associated system2023
Prolonging optical element lifetime in an EUV lithography system2022
System for monitoring a plasma2022
EUV light source with subsystem(s) for maintaining LPP drive laser output during2021
Guiding device and associated system2021
Long-life-light system for deterring rats, mice and similar pets2020