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Home › Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation

Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation

US Patent 6448655 · Granted Sep 10, 2002

Estimated economic value: $13,066,000 ⓘ

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