Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Continuous cleaning megasonic tank with reduced duty cycle transducers

Continuous cleaning megasonic tank with reduced duty cycle transducers

US Patent 6412499 · Granted Jul 2, 2002

Estimated economic value: $21,510,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for CMP temperature control2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Apparatus and method of substrate edge cleaning and substrate carrier head gap c2025
Control of processing parameters for substrate polishing with substrate precessi2025
Apparatus and method for CMP temperature control2025
Apparatus and method for CMP temperature control2025
Apparatus and method for CMP temperature control2025
Apparatus and method for CMP temperature control2025
Wafer edge asymmetry correction using groove in polishing pad2025
Wafer edge asymmetry correction using groove in polishing pad2025
Apparatus and method of brush cleaning using periodic chemical treatments2025
Temperature control of chemical mechanical polishing2025