Temperature control of chemical mechanical polishing

Assignee

• Applied Materials

Inventors

• Haosheng Wu (25 patents)
• Hari Soundararajan (21 patents)
• Yen-Chu Yang (6 patents)
• Jianshe Tang (49 patents)
• Shou-Sung Chang (64 patents)
• Shih-Haur Shen (25 patents)
• Taketo Sekine (6 patents)

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