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Home › Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

Scalable lead zirconium titanate(PZT) thin film material and deposition method, and ferroelectric memory device structures comprising such thin film material

US Patent 6316797 · Granted Nov 13, 2001

Estimated economic value: $10,216,000 ⓘ

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