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Home › Method of prefilling of keyhole at the top metal level with photoresist to prevent passivation damage even for a severe top metal rule

Method of prefilling of keyhole at the top metal level with photoresist to prevent passivation damage even for a severe top metal rule

US Patent 6294456 · Granted Sep 25, 2001

Estimated economic value: $2,626,000 ⓘ

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